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Important slides for download for APD item 2

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The surge in popularity of over-the-top (OTT) media services and 5G mobile front-haul networks has driven up the demand for optical communication channel bandwidth. The 400Gb/s Ethernet system which uses a pulse-amplitude modulation (PAM-4) format with a 53 Gbaud per channel has been developed to meet the requirements for faster data rates. However, when the linking distance exceeds 40 km, the limited output optical power of the electro-absorption-modulated laser (EML) transmitter and the sensitivity of the p-i-n PD based receiver place limitations upon the optical power budget needed to maintain such a high data rate. Avalanche photodiodes (APDs) with wide optical-to-electrical (O-E) bandwidths and higher sensitivity than that of conventional PDs, have proven an effective way to alleviate the aforementioned problems on the receiver side . Recently, the Si/Ge based APDs have demonstrated excellent dynamic and static performance for > 106 Gbit/sec transmissions per lane. Compared with their III-V counterparts, the Si/Ge APDs show improved dynamic performance, mainly due to the superior carrier multiplication process inside the Silicon M- layer over the III-V M-layer, which occurs in In0.52Al0.48As. However, this kind of APD, in which the active Ge photo-absorption layer is usually grown on lattice-mismatched silicon substrates, interface defects become a challenge affecting the reliability under harsh operation conditions, e.g., in uncooled environments or for high optical power illuminations (~mW). In addition to the PAM-4 modulation formats, coherent communication schemes have become an alternative solution for >106 Gbit/sec transmissions. However, the PDs or APDs in a coherent receiver need to sustain high-speed and high-linearity performance under strong (~ mW) optical local oscillator (LO) pumping powers to ensure high sensitivity performance. It has been demonstrated that with the In0.52Al0.48As based APDs one can attain a larger signal-to-noise (S/N) ratio with a lower optical LO power compared with the traditional p-i-n PDs used for coherent applications, such as FMCW lidar. Such requirements have driven the development of high-speed III-V APDs with high linearity and reliable high-power performance. In order to ensure an increase in the bandwidth and saturation power of APDs, a gradual decrease in the thickness of both their absorber and M-layers is necessary, but this comes at the cost of lower responsivity. A relaxation in the trade-off between the bandwidth and responsivity and further improvement in the GBP has been reported for waveguide type APDs (WGAPD) using thinner absorbers. High-responsivity performance in such devices can be maintained by properly increasing the absorption length. However, the edge-coupled waveguide APD structure typically has a substantially narrower alignment tolerance than its vertically illuminated counterparts (5 vs. 25 um), which is due to the smaller aperture size of the optical waveguides. The backside-illuminated ADP structure is another possibility for further enhancing the responsivity of a top-illuminated structure because of the double pass of the incident optical signal through the topmost contact metal, which serves as a reflector. However, the flip-chip bonding package for backside illumination usually induces parasitic capacitance, which degrades the net O-E bandwidth of the PD. In the recent years, we demonstrate a In0.52Al0.48As based backside-illuminated APD with a novel M-layer designs and flip-chip bonding package which are targeted for relaxing the fundamental trade-offs among responsivity and bandwidth. The packaged device exhibits a more moderate damping O-E frequency response and superior bandwidth (36 vs. 31 GHz) and responsivity (3.4 vs. 2.3 A/W) to those of the top-illuminated reference device under 0.9 Vbr operation. In terms of high-power performance, with this device package, we are also able to attain a record-high millimeter wave output power (0 dBm) at 40 GHz with a high saturation current (12.5 mA at +8.8 dBm optical power) among all those reported for high-speed APDs. These excellent performances in terms of speed, responsivity, dark current (175 nA), gain-bandwidth product (>1 THz) and saturation current of these APDs ensure thier applicability for advanced high-speed receivers in PON or coherent system.

Figure 1. (a) Conceptual cross-sectional view of Device A; (b) simulated E-field distribution in the horizontal (AA’) direction; and (c) top view of the fabricated device.

Fig. 2. Measured dark current, photocurrent, and operation gain versus bias voltage under different optical pumping powers at the 1.31 μm wavelength for all three APDs: (a) Device A, (b) Device B and (c) Device C.

Fig. 3. Bias dependent O-E frequency responses of Devices (a) A (b) B, and (c) C measured under a low 10 μW optical pumping power at the 1.55 μm wavelength.

Fig. 4. Measured photo generated RF power versus photocurrent, at a frequency of 40 GHz for heterodyne beating under different Vbr for Device A with different active mesa diameters of: (a) 3, (b) 10, and (c) 14 μm.

TABLE

BENCHMARK HIGH PERFORMANCE APD PERFORMANCE

Related papers:

1. Yen-Kun Wu, Chao-Chuan Kuo, Pei-Syuan Lin, Sean Yang, H.-S. Chen, Jack Jia-Sheng Huang, and Jin-Wei Shi*, "Thinning of Cascaded Multiplication Layers in Avalanche Photodiodes for High-Speed and High-Power-Tolerant Performance," to be published in Journal of Lightwave Technology, doi: 10.1109/JLT.2024.3453851.

2. Naseem, Nan-Wei Chen, Syed Hasan Parvez, Zohauddin Ahmad, Sean Yang, H-S Chen, Hsiang-Szu Chang, Jack Jia-Sheng Huang, and Jin-Wei Shi*, "Simultaneous enhancement of the bandwidth and responsivity in high-speed avalanche photodiodes with an optimized flip-chip bonding package," Opt. Express vol. 31, pp. 26463-26473, July, 2023.

3. Nassem, Po-Shun Wang, Zohauddin Ahmad, Syed Hasan Parvez, Sean Yang, H.-S. Chen, Hsiang-Szu Chang, Jack Jia-Sheng Huang, and Jin-Wei Shi*, "Top-Illuminated Avalanche Photodiodes With Cascaded Multiplication Layers for High-Speed and Wide Dynamic Range Performance," in Journal of Lightwave Technology, vol. 40, no. 24, pp. 7893-7900, 15 Dec.15, 2022, doi: 10.1109/JLT.2022.3204743.

4. Naseem, Z. Ahmad, Y.-M. Liao, R.-L. Chao, P.-S. Wang, Y.-S. Lee, S. Yang, S.-Y. Wang, H.-S. Chang, H.-S. Chen, J. J.-S. Huang, E. Chou, Y.-H. Jan, and J.-W. Shi*, “Avalanche Photodiodes with Dual Multiplication Layers for High-Speed and Wide Dynamic Range Performances,” Photonics, vol. 8, no. 4, p. 98, Mar. 2021. (Invited Paper)

5. Hao-Yi Zhao, Naseem, Andrew H. Jones, Rui-Lin Chao, Zohauddin Ahmad, Joe C. Campbell, and Jin-Wei Shi*, "High-Speed Avalanche Photodiodes with Wide Dynamic Range Performance," Journal of Lightwave Technology, vol. 37, no. 23, pp. 5945-5952, 1 Dec.1, 2019.

6. Song-Lin Wu, Naseem, Jhih-Min Wun, Rui-Lin Chao, Jack Jia-Sheng Huang, N.-W. Wang, Yu-Heng Jan, H.-S. Chen, C.-J. Ni, Hsiang-Szu Chang, Emin Chou, and Jin-Wei Shi*, “High-Speed In0.52Al0.48As Based Avalanche Photodiode with Top-Illuminated Design for 100 Gbit/sec ER-4 System,” IEEE/OSA Journal of Lightwave Technology, vol. 36, pp. 5505-5510, Dec., 2018.

7. Yi-Han Chen, Jhih-Min Wun, Song-Lin Wu, Rui-Lin Chao, Jack Jia-Sheng Huang, Yu-Heng Jan, H.-S. Chen, C.-J. Ni, Hsiang-Szu Chang, Emin Chou, and Jin-Wei Shi*, “Top-Illuminated In0.52Al0.48As-Based Avalanche Photodiode with Dual Charge Layers for High-Speed and Low Dark Current Performances,” IEEE J. of Sel. Topics in Quantum Electronics, vol. 24, no. 2, pp. 3800208, March/April, 2018.